Service Description
During wafer transfer in equipment, various organic contaminants can arise — such as pollutant migration from processes, contaminants inherent to wafers, and dust generated by equipment. We provide contamination verification analysis of the interior of wafer carriers, ensuring every carrier undergoes rigorous quality inspection before delivery and providing customers with reliable data support.
Testing Categories
Laboratory Instruments
Equipped with high-precision analytical instruments from top international brands, covering multi-dimensional testing for organics, metal ions, anions & cations — ensuring accurate and reliable test results.
Testing Equipment List
| Test Item | Equipment | Description | Specifications |
|---|---|---|---|
| GCMS | GC-MS | Organic Compound Analysis | Identifies 100,000+ organic compounds |
| LPC | Liquid Particle Counter | Liquid Particle Analysis | 0.1 / 0.15 / 0.2 / 0.3 / 0.5 um |
| APC | Airborne Particle Counter | Airborne Particle Analysis | 0.1 / 0.15 / 0.2 / 0.3 / 0.5 um |
| IC | Ion Chromatograph | Anion & Cation Analysis | F / Cl / Br / PO / NO / SO / NH anions & cations |
| ICPMS | ICP-MS | Metal Ion Analysis | Fe / Cu / K / Li / Mg / Na / Ca and other metal ions |
Testing Capabilities in Detail
Organic Compound Analysis
GC-MS GC-MS
- • Brand: Shimadzu
- • Model: GCMS-2020NX
- • Capability: Identifies 100,000+ organic compounds
Metal Ion Analysis
ICP-MS — Inductively Coupled Plasma Mass Spectrometer
- • Brand: Agilent
- • Model: 7900 ICP-MS
- • Elements: Fe / Cu / K / Li / Mg / Na / Ca and more
- • Detection Precision: ppt level
Anion & Cation Analysis
IC Ion Chromatograph
- • Brand: Thermo Fisher
- • Model: ICS-6000
- • Test Items: F / Cl / Br / PO / NO / SO / NH and more
Liquid Particle Analysis
LPC Liquid Particle Counter
- • Brand: Lighthouse
- • Model: Remote LPC 0.1
- • Particle Size: 0.1 / 0.15 / 0.2 / 0.3 / 0.5 μm
Airborne Particle Analysis
APC Airborne Particle Counter
- • Brand: TSI
- • Model: 9110s
- • Particle Size: 0.1 / 0.15 / 0.2 / 0.3 / 0.5 μm
- • Application: Cleanroom environmental monitoring, process gas testing
Need Professional Testing Services?
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