Testing Capabilities Overview
During wafer transfer in equipment, various organic contaminants can arise — such as pollutant migration from processes, contaminants inherent to wafers, and dust generated by equipment. We provide contamination verification analysis of the interior of wafer carriers, covering multiple testing items including metal ions, anions & cations, liquid particles, airborne particles, and VOS.
We operate the highest-precision analytical testing equipment in the domestic industry, with detection down to ppt level, Providing customers with reliable data support and quality assurance.
Five Core Testing Capabilities
Organic Contaminant Analysis
GC-MSUsing GC-MS for qualitative and quantitative analysis of organic contaminants inside wafer carriers.
Metal Ion Analysis
ICP-MSICP-MS for high-precision detection of multiple metal ion concentrations.
Anion & Cation Analysis
ICIon chromatograph for precise qualitative and quantitative analysis of various anions and cations.
Liquid Particle Analysis
LPCLiquid Particle Counter — real-time monitoring of particle counts in cleaning fluids and UPW.
Airborne Particle Analysis
APCAirborne Particle Counter — monitoring airborne particle concentration in cleanrooms to ensure environmental compliance.
Laboratory Instruments
Equipped with high-precision analytical instruments from top international brands, covering multi-dimensional testing for organics, metal ions, and anions & cations — ensuring accurate and reliable test results.
Testing Equipment List
| Test Item | Equipment | Brand | Model | Description |
|---|---|---|---|---|
| Organic Contaminant Analysis | GC-MS | Shimadzu | GCMS-2020NX | Identifies 100,000+ organic compounds |
| Metal Ion Analysis | ICP-MS | Agilent | 7900 ICP-MS | ppt level, Fe/Cu/K/Li/Mg/Na/Ca & more |
| Anion & Cation Analysis | Ion Chromatograph | Thermo Fisher | ICS-6000 | F/Cl/Br/PO/NO/SO/NH & more |
| Liquid Particle Analysis | Liquid Particle Counter | Lighthouse | Remote LPC 0.1 | 0.1/0.15/0.2/0.3/0.5 μm |
| Airborne Particle Analysis | Airborne Particle Counter | TSI | 9110s | 0.1/0.15/0.2/0.3/0.5 μm |
Laboratory Environment
Need Professional Testing & Analysis Services?
XF Semiconductor has high-precision testing equipment and a professional technical team, providing comprehensive semiconductor carrier Testing & Analysis services.
Contact Us