Advanced Equipment

Premium imported and domestic precision equipment, building a full-process intelligent production and testing system

Equipment Overview

The XF Semiconductor Hefei facility is equipped with high-purity automated material handling and storage systems connected to automated cleaning equipment, minimizing human impact on product quality. Our testing equipment comes from leading international brands, enabling comprehensive detection of metal ions, anions & cations, liquid particles, airborne particles, and organic substances — with detection precision reaching the ppt level.

Automated High-Purity Cleaning Machine
Automated Material Handling System
Automated Storage System

Core Equipment List

No.Equipment NameOriginBrandModel
1Automated High-Purity CleanerDomesticJiangsu XinmengFC-300
2Automation System IntegrationImportedMIRL AutomationSTK-01/02/03
3GC-MS SpectrometerImportedShimadzuGCMS-2020NX
4ICP-MS SpectrometerImportedAgilent7900 ICP-MS
5IC Ion ChromatographImportedThermo FisherICS-6000
6LPC Liquid Particle CounterImportedLighthouseRemote LPC 0.1
7APC Airborne Particle CounterImportedTSI9110s

Featured Equipment

AMHS Automated Handling System

AMHS Automated Handling System 1
AMHS 01

AMHS Automated Handling System

High-purity automated handling system connected to automated cleaning equipment — reducing human impact and improving production efficiency.
AMHS Automated Handling System 2
AMHS 02

AMHS Automated Storage System

Automated wafer carrier storage and scheduling system — enabling efficient, precise, and contamination-free carrier handling.

High-Purity Cleaning Equipment

High-Purity Cleaning Line 1
Cleaning Line 01

High-Purity Cleaning Line

Fully automated high-purity cleaning production line — ensuring every carrier meets semiconductor-grade cleanliness standards.
High-Purity Cleaning Line 2
Cleaning Line 02

Automated Cleaning Equipment

Integrated multi-process cleaning technology — enabling efficient, stable, and traceable carrier cleaning operations.
High-Purity Cleaning Line 3
Cleaning Line 03

Cleaning Production Line Overview

Complete cleaning production line layout within Class 1/3 cleanrooms — cleanliness guaranteed throughout the process.
Cleaning Line Observation Window
Observation Window

Cleaning Line Observation Window

Full-transparent observation window design — real-time monitoring of cleaning line operations, ensuring visual management of the production process.

Equipment Advantages

High-Precision Testing

ICP-MS detection precision reaches ppt level; GC-MS identifies 100,000+ organic compounds — comprehensive quality assurance.

Automated Production

High-purity automated handling and storage systems connected to automated cleaning equipment — minimizing human impact.

International Brands

Testing instruments from leading international brands including Shimadzu, Agilent, and Thermo Fisher — stable and reliable performance.