Service Parameters
Class 1/3
Cleanroom Class
ISO 14644-1
8" / 12"
Cleaning Sizes
Full Size Coverage
FOSB / FOUP
Cleaning Categories
FOUP / FOSB / Shipping Box, etc.
30K/M
Monthly Capacity
Stable Delivery Capability
Cleaning Process
1
Incoming
In-coming
2
Inspection
Inspect
3
Cleaning
Cleaning
4
Drying
Drying
5
Sampling & Analysis
Analysis
6
Quality Check
Inspect
7
Vacuum Pack
Packing
Class 3 Prep Area
Incoming inspection and preparation
Class 3 Cleanroom
Core cleaning & drying processes
Class 1 Cleanroom
Quality Inspection & Vacuum Pack
Detailed Cleaning Steps
1
Carrier Loading
Carriers awaiting cleaning are loaded into the line
2
IQC Pre-Cleaning Inspection
Inspect carrier condition and confirm cleaning plan
3
Pre-Cleaning
Remove large surface particle contaminants
4
UPW Clean Rinse
DI Water Fine Rinse
5
UPW Ultrasonic Cleaning
Ultrasonic-assisted microparticle removal
6
UPW Clean Rinse
Secondary Clean Rinse
7
UPW Spray Rinse
High-pressure spray ensures no dead spots
8
UPW Clean Rinse
Final Fine Rinse
9
Heated Air Water Spot Removal
Hot air drying removes surface water spots
10
Air Drying
Air drying in Class 1 cleanroom
11
Quality Check
Test product quality per inspection requirements
12
Vacuum Packaging & Shipping
Vacuum-packed & shipped per customer packaging requirements
Cleaning Equipment & Environment
Equipped with ISO 14644-1 Class 1/3 high-purity cleanrooms and automated cleaning production lines, ensuring every carrier completes cleaning in a clean environment and meets semiconductor-grade cleanliness standards.
High-Purity Cleaning Line
Automated Cleaning Equipment
Cleaning Production Line Overview
AMHS Automated Handling System
AMHS Automated Storage System
Cleaning Line Observation Window